Learning outcomes of the course unit
The course provides the main notions about the manufacturing technologies for VLSI integrated circuits.
Course contents summary
-Preparation of Si wafers.
-Generalities about planar silicon processing.
-Doping by diffusion or by ion implantation.
-Chemical vapor deposition, epitaxial growth.
-Wet and dry etching.
-Interconnects and metallizations.
-Technology and principles of operation of some compound semiconductor devices.
S.M. SZE: ' VLSI Technology ', McGraw-Hill, 1988
G. SONCINI: ' Tecnologie Microelettroniche ', Boringhieri, 1986