MICROELECTRONIC TECHNOLOGY
COD. 14713
DEGREE: INGEGNERIA ELETTRONICA
TYPE OF COURSE: Activities specific to the location
Learning outcomes of the course unit
The course provides the main notions about the manufacturing technologies for VLSI integrated circuits.
Course contents summary
Preparation of Silicon wafers.
Generalities about planar silicon processing.
Photolithography.
Oxidation.
Doping by diffusion or by ion implantation.
Chemical vapor deposition, epitaxial growth.
Wet and dry etching.
Interconnects and metallizations.
Packaging problems.
Recommended readings
S.M. SZE: ' VLSI Technology ', McGraw-Hill, 1988
G. SONCINI: ' Tecnologie Microelettroniche ', Boringhieri, 1986
Teaching methods
NAME OF LECTURER
ACADEMIC YEAR: 2008/2009
YEAR OF STUDY: 2
SEMESTER: First semester
NUMBER OF CREDITS: 5
UNIT COORDINATOR: SOZZI Giovanna
CONTACT HOURS: 45
