Learning outcomes of the course unit
This course provides the students with skills and knowledge required to understand the technological processes and design issues of electronic and optoelectronic devices for different applications.
Training also extends to knowledge and practical use of advanced CAD tools to design new devices based on Silicon (including highly scaled devices) and on other semiconductors, and also optoelectronic devices.
Course contents summary
Silicon planar process: the different steps of silicon planar process are analyzed showing the main technological constraints and the improvement capabilities; some important processes are studied in detail (i.e. CMOS process).
The scaling, integration and time to market concepts in semiconductor industry are presented starting from ITRS (International Technology Roadmap for Semiconductors), with special attention to MOSFET devices, semiconductor memories, and interconnection lines which are analyzed from the point of view of materials, technologies, process techniques and new structures.
Photovoltaic modules: some of the main photovoltaic technologies are analyzed, and special emphasis is given to thin film solar cells.
Some of the main techniques, technologies and applications of energy harvesting are presented.
Advanced CAD tools to analyze and design some of the described devices are used (i.e. modelling of solar cells).
1) S.M.Sze, "ULSI technology", Mcgraw hill, 1996
2) S.M.Sze, "VLSI technology", McGraw-Hill Book Co., 1983
3) G. Soncini, "Tecnologie microelettroniche", Boringhieri, 1986.
4) Vijay K. Varadan, "Smart material systems and MEMS : design and development methodologies" Wiley, 2006.
Oral Lessons and Laboratory Activities
Assessment methods and criteria